Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis
Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis
复制标题
通过干涉显微镜和傅立叶变换分析自动进行条纹图案外推以进行图案化表面分析
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
X. Leroux
中科院分区：
文献类型：
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作者：
C. Bréluzeau;A. Bosseboeuf;S. Petitgrand;X. Leroux
详细研究了基于Gerchberg算法的条纹外推的傅立叶变换解调方法在小图案和/或岩屑表面快速轮廓分析中的应用。对于这样的表面，光谱泄漏是一个主要问题，因为如果不进行外推，它会损坏大部分感兴趣区域的数据。通过干涉显微镜在微机械设备上记录的模拟条纹图案或真实干涉图用于此评估。在傅里叶空间中测试了不同的滤波器形状，以确定干涉图中的有效区域，用于条纹外推阶段和最后的相位解调。结果表明，具有适应傅立叶空间调制旁瓣形状的滤波器允许在没有用户专业知识的情况下自动测量，同时保持高精度。阐明了外推边距、条纹密度、条纹外推迭代次数等参数选择的实用规则，以实现准确、快速的自动化测量。
Fringe pattern demodulation by the Fourier transform method associated with fringe extrapolation by the Gerchberg algorithm was investigated in details for its application to fast profiling of surfaces with small patterns and/or cuttings. For such surfaces, spectral leakage is a major concern as it corrupts data in a large part of the areas of interest if extrapolation is not carried out. Simulated fringe patterns or real interferograms recorded on micromechanical devices by interference microscopy were used for this evaluation. Different filter shapes in the Fourier space were tested for the determination of valid areas in the interferogram, for the fringe extrapolation stage and for the final phase demodulation. It is demonstrated that filters with a shape adapted to the modulation sidelobe in the Fourier space allow automated measurements without user expertise while maintaining a high accuracy. Some practical rules for the choice of extrapolation margins, fringe density, fringe extrapolation iteration number and other parameters are clarified to reach accurate and fast automated measurements.