Numerical study of RF discharge caused by secondary electron emission
Numerical study of RF discharge caused by secondary electron emission
复制标题
DOI：
10.1088/0022-3727/22/12/007
复制
发表时间：
1989-12
期刊：
影响因子：
--
通讯作者：
K. Sakamoto;Y. Ikeda;T. Imai
中科院分区：
文献类型：
--
作者：
K. Sakamoto;Y. Ikeda;T. Imai
本文提出了一种研究由电极二次电子发射引起的射频放电，即二次放电的数值方法。利用这种方法，系统地获得了电子倍增的精确阈值。此外，该方法可以扩展到电极和外加场的非均匀配置。例如，模拟结果与典型的实验结果在以前的工作进行了比较。平行电极获得良好的协议。此外，一个中间（次谐波）模式之间发现通常的谐振模式。在同轴电极的情况下，当假设低能电子在电极表面上的反射时，获得了一致性。
A numerical method is presented for studying an RF discharge caused by secondary electron emission from the electrode, i.e. the multipactoring discharge. Using this method, the precise thresholds of the electron multiplication are obtained systematically. Also, this method can be extended to a nonuniform configuration of the electrode and the applied field. For example, the simulation results are compared with typical experimental results in the previous work. Good agreement is obtained for parallel electrodes. Furthermore, an intermediate (subharmonics) mode is found between the usual resonant modes. In the case of the coaxial electrodes, the agreement was obtained when the reflection of low-energy electrons on the surface of the electrode was assumed.