Contrast in the transmission mode of a low‐voltage scanning electron microscope

Contrast in the transmission mode of a low‐voltage scanning electron microscope
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低压扫描电子显微镜透射模式对比

DOI:
10.1111/j.1365-2818.1994.tb03444.x
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发表时间:
1994
影响因子:
2
通讯作者:
Ludwig Reimer
Ludwig Reimer
中科院分区:
工程技术4区
文献类型:
--
作者:
U. Golla;B. Schindler;Ludwig Reimer

文献摘要

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在低电压扫描电子显微镜的透射模式下测量了碳和铂薄膜的对比厚度(xk),孔径为40和100 mrad,电子能量(E)在1和30 keV之间。测量值与先前在透射电子显微镜中测量的E(≥ 17 keV)重叠。碳和铂之间xk随E减小而减小的差异与Wentzel克雷默-布里渊计算的弹性截面一致。已知xk的值允许透射率随样本质量厚度(x = ρt)的增加而呈指数下降,以及染色生物切片的对比度增益随电子能量的减少而增加,以计算明场和暗场模式。
The contrast thicknesses (xk) of thin carbon and platinum films have been measured in the transmission mode of a low‐voltage scanning electron microscope for apertures of 40 and 100 mrad and electron energies (E) between 1 and 30 keV. The measured values overlap with those previously measured for E (≥ 17keV) in a transmission electron microscope. Differences in the decrease of xk with decreasing E between carbon and platinum agree with Wentzel‐Kramer‐Brillouin calculations of the elastic cross‐sections. Knowing the value of xk allows the exponential decrease ∝ exp(—x/xk) in transmission with increasing mass‐thickness (x = ρt) of the specimen and the increasing gain of contrast for stained biological sections with decreasing electron energy to be calculated for brightfield and darkfield modes.