Three operation modes of acoustic wave devices with a lateral field exictation structure
Three operation modes of acoustic wave devices with a lateral field exictation structure
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横向场激励结构声波器件的三种工作模式
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
Gang Jing
中科院分区：
文献类型：
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作者：
Wenyan Wang;Zhitian Zhang;Chao Zhang;Yan Liu;G. Feng;Gang Jing
通过扩展的Christoffel-Bechmann方法的理论计算和实验，给出了LFE器件的三种工作模式：纯LFE模式、准LFE模式和伪LFE模式。利用（yxl）-58deg LiNbO3、（yxl）-16.51deg LiTaO3和AT切石英晶体制作了几个具有相似几何结构的约5MHz LFE器件，用于分析三种LFE操作模式。计算了LFE和TFE的压电耦合因子和声波相速度，为LFE器件的设计提供了理论依据。从器件的几何结构和材料常数出发，理论推导出了谐振时的动电阻，并与三种模式的测量结果进行了比较。
Through theoretical calculations using the extended Christoffel-Bechmann method and experiments, three operation modes of the LFE devices, which were referred to as the pure-LFE, quasi-LFE and pseudo-LFE modes, were presented. Several about 5 MHz LFE devices with similar geometry using the (yxl)-58deg LiNbO3, (yxl)-16.51deg LiTaO3 and AT-cut quartz crystals were fabricated for analyzing three LFE operation modes. Their piezoelectric coupling factors and acoustic wave phase velocity for LFE and TFE were calculated for designing LFE devices. The motional resistance at resonance was theoretically derived from the device geometry and material constants and was well corresponding to the measured results for analyzing three modes.