Sputtering fabrication of large scale ZnO nanobowl arrays using colloidal crystal templates.
Sputtering fabrication of large scale ZnO nanobowl arrays using colloidal crystal templates.
复制标题
DOI：
10.1166/jnn.2010.2912
复制
发表时间：
2010-11
影响因子：
--
通讯作者：
Y. Tao;M. Fu;Ailun Zhao;D. He;Yongsheng Wang
中科院分区：
文献类型：
--
作者：
Y. Tao;M. Fu;Ailun Zhao;D. He;Yongsheng Wang
以自组装的聚苯乙烯微球阵列为模板，采用磁控溅射法制备了面积超过cm ~ 2的有序ZnO纳米碗阵列。该过程开始于三维（3D）六边形聚苯乙烯球阵列的自组装沉积。采用磁控溅射法在三维聚苯乙烯胶体晶体模板内沉积ZnO，退火去除球形颗粒后，制备出大面积有序的ZnO纳米碗片。整个纳米碗片可以被剥离，留下意外观察到的反蛋白石结构。通过控制聚苯乙烯微球的大小可以控制纳米碗的大小，通过改变溅射参数可以改变纳米碗片的高度。
Ordered ZnO nanobowl arrays over cm2 areas were prepared by magnetron sputtering using the self-assembled polystyrene spheres arrays as templates. The process started with self-assembled sedimentation of there-dimensional (3D) hexagonal polystyrene sphere arrays. By depositing ZnO within the interstitials of 3D polystyrene colloidal crystal templates using magnetron sputtering, large-area ordered ZnO nanobowl sheets were prepared after removing the spheres by annealing. The whole nanobowl sheet could be lifted off, leaving accidentally observed inverse opal structures. The sizes of the nanobowls could be controlled by the size of the polystyrene spheres, the height of nanobowl sheets could be altered by changing sputtering parameters.