Simultaneous Calculation of Reflection, Physical Sputtering and Secondary Electron Emission from a Metal Surface due to Impact of Low-Energy Ions
Simultaneous Calculation of Reflection, Physical Sputtering and Secondary Electron Emission from a Metal Surface due to Impact of Low-Energy Ions
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同时计算低能离子撞击引起的金属表面反射、物理溅射和二次电子发射
DOI：
10.1143/jjap.38.6058
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发表时间：
1999
期刊：
影响因子：
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通讯作者：
K. Ohya
中科院分区：
文献类型：
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作者：
Retsuo Kawakami;J. Kawata;K. Ohya
本文介绍了一个计算低能离子在固体中弹性和非弹性碰撞过程的计算机模拟程序。在该程序中，除了模拟运动粒子与固体原子的弹性碰撞外，还使用Monte Carlo技术模拟了穿透离子和反冲原子对电子的直接激发。激发电子的电子级联和反冲原子的碰撞级联也被考虑在内，因此，该代码允许我们模拟离子-固体相互作用，如离子反射，物理溅射和二次电子发射从固体。该程序可用于计算原子序数为1 ~ 17、能量为10 eV ~ 10 keV的离子在垂直入射时撞击铝时发射粒子的能量分布、角分布和总粒子产额。计算的溅射产额和离子反射系数与最近提出的经验公式符合较好。计算的电子产额显示出明显的依赖于Z1和Ei，但Ei的依赖性是不同的电子阻止本领在这样低的碰撞能量。发射粒子的能量和角分布表明二次电子发射和物理溅射的相似性，在最近的实验中观察到的。
A computer simulation code which treats elastic and inelastic collision processes of low-energy ions in solids is presented. In the code, the direct excitation of electrons by a penetrating ion and recoiling atoms is simulated using the Monte Carlo technique, in addition to the simulation of elastic collisions of the moving particles with solid atoms. Electron cascades of the excited electrons and collision cascades of the recoil atoms are also taken into account, and as a result, the code allows us to simulate ion-solid interactions such as ion reflection, physical sputtering and secondary electron emission from the solids. This code is applied to calculations of the energy and angular distributions of emitted particles and the total particle yields of aluminum by impact of ions with the atomic numbers Z1 of 1 to 17 and energies Ei of 10 eV to 10 keV at normal incidence. The calculated sputtering yield and ion reflection coefficient are in reasonable agreement with empirical formulae which have been recently presented. The calculated electron yield shows the clear dependence on Z1 and Ei, but the Ei-dependence is different from that of the electronic stopping power at such low impact energies. The energy and angular distributions of emitted particles indicate the similarities of the secondary electron emission and the physical sputtering, as observed in recent experiments.
T.Itoh；Y.Yamamura；N.Itoh：“离子束辅助薄膜生长” ELSEVIER，59-100 (1989)
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