Eddy‐Current Testing with GMR Magnetic Sensor Arrays
Eddy‐Current Testing with GMR Magnetic Sensor Arrays
复制标题
使用 GMR 磁传感器阵列进行涡流测试
DOI：
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复制
发表时间：
2004
期刊：
影响因子：
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通讯作者：
S. Smith
中科院分区：
文献类型：
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作者：
Carl H. Smith;R. Schneider;T. Dogaru;S. Smith
GMR磁传感器和GMR传感器阵列具有与频率无关的灵敏度，可提高涡流检测的速度、深度和分辨率。GMR磁传感器阵列允许在单次扫描中快速扫描缺陷区域。这些固态磁传感器的小尺寸和低功耗使得能够在电路板上制造紧凑的传感器阵列，甚至是片上传感器阵列。当需要精细分辨率时，已经制造了具有小至5微米的传感器间距的阵列。GMR传感器元件可以沉积在有源硅衬底上，从而促进片上信号处理和多路复用。这种集成简化了传感器/信号处理接口，最大限度地减少了引线数量，并可降低噪声影响。本文将讨论在GMR传感器上制作阵列的技术，特别是片上阵列。将描述具有片上信号处理和复用的集成传感器阵列。终于...
The advent of GMR magnetic sensors and GMR sensor arrays with frequency‐independent sensitivity offers improvements in speed, depth, and resolution in eddy‐current testing. Arrays of GMR magnetic sensors allow rapid scanning of an area for defects in a single pass. The small size and low power consumption of these solid‐state magnetic sensors enable the fabrication of compact arrays of sensors on circuit boards and even on‐chip sensor arrays. Arrays have been fabricated with sensor spacing as small as 5 micrometers when fine resolution is required. GMR sensor elements can be deposited on active silicon substrates facilitating on‐chip signal processing and multiplexing. This integration simplifies the sensor/signal‐processing interface, minimizes the number of leads, and can reduce the effect of noise. This paper will discuss the technology of fabricating arrays on GMR sensors, especially on‐chip arrays. Integrated sensor arrays with on‐chip signal processing and multiplexing will be described. Finally, so...