Laser-induced forward transfer with optical stamp for high-quality film printing (Conference Presentation)
Laser-induced forward transfer with optical stamp for high-quality film printing (Conference Presentation)
复制标题
使用光学印模进行激光诱导正向传输，实现高质量薄膜印刷（会议演示）
DOI：
10.1117/12.2288695
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
H. Niino
中科院分区：
文献类型：
--
作者：
A. Narazaki;Tadatake Sato;H. Niino
对于高质量的胶片印刷，我们新开发了一种带有光学印章的激光诱导向前转移（简称LIFTop），它包括两步转移过程。在第一步中，将功能膜转移到具有高折射率和弹性的透明聚合物如PDMS上，我们称之为“光学印章”。此印章有助于避免转移膜的图案扩散和破裂。然后，将光学印模上的转移的微图案进一步转移到最终目标上。在这次演讲中，金属和透明导电氧化物膜转移使用我们的新LIFT工艺进行了演示。
For high quality film printing, we have newly developed a laser-induced forward transfer with optical stamp (shortly, LIFTop), that consists of a two-step transfer process. In the first step, functional films were transferred onto a transparent polymer having high adhesiveness and elasticity like PDMS, which we call “optical stamp”. This stamp helps to avoid the transferred film from pattern spread and fracture. Then, the transferred micro-pattern on the optical stamp was further transferred onto a final target. In this talk, metal and transparent conductive oxide film transfer was demonstrated using our new LIFT process.