Observation of buried interfaces with low energy electron microscopy.
Observation of buried interfaces with low energy electron microscopy.
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用低能电子显微镜观察埋入界面。
DOI：
10.1103/physrevlett.71.3299
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发表时间：
1993
影响因子：
8.6
通讯作者：
Mark C. Reuter
中科院分区：
文献类型：
--
作者：
R. Tromp;A. W. D. V. D. Gon;F. Legoues;Mark C. Reuter
在这篇论文中，我们展示了相干低能电子束（<100 eV）可以用来获得深埋在样品表面以下的结构和缺陷的真实空间图像。这种埋藏结构的弹性应变场延伸到自由表面，在反射的电子波中产生局域相移，在轻微的物镜离焦条件下产生优异的图像对比度。我们现在可以实时地对埋藏界面和缺陷的形成和演化进行成像。由于使用的电子能量非常低，这种成像方法是非破坏性的
In this Letter we show that a coherent low energy electron beam (<100 eV) can be used to obtain real space images of structures and defects buried deep below the surface of the sample. The elastic strain fields of such buried structures, extending to the free surface, are found to give rise to localized phase shifts in the reflected electron waves, resulting in excellent image contrast under slight objective lens defocus conditions. We can now image the formation and evolution of buried interfaces and defects in situ, and in real time. Because of the very low electron energies used, this imaging method is nondestructive