Study on the integration of vibration/pressure/magnetic field sensor based on nanofiber film and micro-electro-mechanical system technology
Study on the integration of vibration/pressure/magnetic field sensor based on nanofiber film and micro-electro-mechanical system technology
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DOI：
10.1166/mex.2021.1944
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发表时间：
2021
影响因子：
0.7
通讯作者：
Wan Chen
中科院分区：
文献类型：
--
作者：
Guo Tao;Han Wenman;Zhou Yongjun;Shi Shuai;Chang Yanxiang;Chuo Yanjun;Wan Chen
