High pressure discharges in cavities formed by microfabrication techniques
High pressure discharges in cavities formed by microfabrication techniques
复制标题
微加工技术形成的空腔中的高压放电
DOI：
10.1063/1.120412
复制
发表时间：
1997
影响因子：
4
通讯作者：
J. Racz
中科院分区：
文献类型：
--
作者：
B. Khan;D. Cammack;R. Pinker;J. Racz
高压放电是小型高强度光源的基础。在这项工作中，我们展示了高压放电的形成，通过将微加工和集成电路技术应用于石英衬底形成的腔中。为了获得高压放电，制造了含有不同数量的汞和氩的空腔。用2.45 GHz的微波源在无电极腔中激发高压汞放电，并在有电极腔中施加直流电压。观察到放电收缩成高压电弧。由于自吸收和激发原子与正常原子之间的碰撞，测量了一个宽的发射光谱，这是高压汞放电的典型特征。光输出和效率随压力的增加而增加。测得的电压被用来估计电极腔内的压力，在本文讨论的两个腔中，其中一个腔的压力高达127 atm。
High pressure discharges are the basis of small high intensity light sources. In this work, we demonstrate the formation of high pressure discharges, in cavities formed by applying micromachining and integrated circuit techniques to quartz substrates. Cavities containing varying amounts of mercury and argon were fabricated to obtain high pressure discharges. A high pressure mercury discharge was formed in the electrodeless cavities by exciting them with a microwave source, operating at 2.45 GHz and in the electroded cavities by applying a dc voltage. The contraction of the discharge into a high pressure arc was observed. A broad emission spectrum due to self-absorption and collisions between excited atoms and normal atoms, typical of high pressure mercury discharges, was measured. The light output and efficacy increased with increasing pressure. The measured voltage was used to estimate the pressure within the electroded cavities, which is as high as 127 atm for one of the two cavities discussed in this w...