Measurement of mechanical properties by ultra-low load indentation
Measurement of mechanical properties by ultra-low load indentation
复制标题
DOI：
10.1016/s0921-5093(98)00724-2
复制
发表时间：
1998-09-30
期刊：
影响因子：
6.4
通讯作者：
Pharr, GM
中科院分区：
文献类型：
--
作者：
Pharr, GM
超低载荷压痕，也称为纳米压痕，是一种广泛使用的工具，用于测量薄膜和小体积材料的机械性能。该技术的一大优点是它能够探测表面，并在空间分辨的基础上绘制其属性，有时分辨率优于1 μ m。本文对超低载荷压痕技术测量材料力学性能的方法进行了综述和讨论。重点是使用锋利的压头，以及如何使用它们来测量弹性模量，硬度和断裂韧性。这些基本的力学性质表征了固体的三种主要变形方式-弹性、塑性和断裂。(C)由Elsevier Science S.A.出版。All rights reserved.
Ultra-low load indentation, also known as nanoindentation, is a widely used tool for measuring the mechanical properties of thin films and small volumes of material. One of the great advantages of the technique is its ability to probe a surface and map its properties on a spatially resolved basis, sometimes with a resolution of better than 1 mu m. In this paper, techniques for measuring mechanical properties by ultra-low load indentation techniques are reviewed and discussed. Emphasis is given to the use of sharp indenters and how they can be used to measure elastic modulus, hardness, and fracture toughness. These fundamental mechanical properties characterize the three primary modes of deformation in solids-elasticity, plasticity, and fracture. (C) 1998 Published by Elsevier Science S.A. All rights reserved.