Self-assembly of flat micro components by capillary forces and shape recognition
Self-assembly of flat micro components by capillary forces and shape recognition
复制标题
通过毛细管力和形状识别自组装扁平微型元件
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
K. Böhringer
中科院分区：
文献类型：
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作者：
Jiandong Fang;S. Liang;Kerwin Wang;X. Xiong;K. Böhringer
本文总结了我们最近的报告，基于两个主要机制的平面微组件的自组装：毛细驱动的自组装和特征导向的自组装。毛细管驱动的自组装在液体环境和空气环境中都得到了证实，由于界面能最小化，实现了高精度的自对准。毛细管驱动自组装技术已成功地组装了发光二极管（LED）和压电陶瓷（PZT）等工作器件。特征导向的自组装依赖于微组件和受体位点上的互补特征，从而对组件形状没有约束。两种不同的特征导向和唯一取向的自组装过程中展示：一个是基于重力驱动的自对准的半干过程，另一个是基于两阶段形状识别的完全干过程。这种面向特征和唯一取向的自组装工艺可以应用于微型器件的晶圆级封装或机器人装配系统的零件进给和自动化。
This paper summarizes our recent reports on self-assembly of flat micro components based on two major mechanisms: capillary-driven self-assembly and feature-directed self-assembly. The capillary-driven self-assembly is demonstrated in both a liquid environment and an air environment, and high accuracy self-alignment is achieved due to interfacial energy minimization. Working devices such as Light Emitting Diode (LED) and PZT components are successfully assembled by the capillary-driven self-assembly processes. The feature-directed self-assembly relies on complementary features on micro components and receptor sites, thereby has no constraint on component shapes. Two different feature-directed and uniquely orienting self-assembly processes are demonstrated: one is a semi dry process based on gravity-driven self-alignment, and the other is a completely dry process based on two-stage shape recognition. The feature-directed and uniquely orienting self-assembly processes can be applied to either wafer level packaging of micro devices or part feeding and palletizing for robotic assembly systems.