The dielectric properties of some ceramic substrate materials at terahertz frequencies
The dielectric properties of some ceramic substrate materials at terahertz frequencies
复制标题
一些陶瓷基板材料在太赫兹频率下的介电性能
DOI：
10.1016/j.jeurceramsoc.2019.06.012
复制
发表时间：
2019-11-01
影响因子：
5.7
通讯作者：
Hao, Zhangcheng
中科院分区：
文献类型：
--
作者：
Ma, Mingsheng;Wang, Yi;Hao, Zhangcheng
The terahertz (THz) dielectric constant (epsilon(r)') and dielectric loss tangent (tan delta) of the commercial LTCC materials (Ferro A6M and DuPont 951), Al2O3 (ceramic and single crystal), AlN and beta-Si3N4 ceramics were measured using a vector network analyzer (VNA) over the frequency range of 140-220 GHz and a time-domain spectrometer (TDS) from 0.2 to 1.0 THz. The results from the two instruments are compared with the literature and show good agreement and consistency. For Ferro A6M, epsilon(r)' = 6.06, tan delta = 0.012 at 1.0 THz. For DuPont 951, epsilon(r)' = 7.67, tan delta = 0.097 at 1.0 THz. For Al2O3 ceramic and single crystal, the measured THz dielectric properties are consistent with the reported works. The dielectric constant of AlN (epsilon(r)' = 8.85) and beta-Si3N4 (epsilon(r)' = 8.41) ceramics in the THz region is a little lower than those reported for the MHz to GHz region. These results provide valuable and much needed reference information for device designers and material scientists.
