Dynamic-mode AFM using the piezoelectric cantilever: investigations of local optical and electrical properties
Dynamic-mode AFM using the piezoelectric cantilever: investigations of local optical and electrical properties
复制标题
使用压电悬臂梁的动态模式 AFM：局部光学和电学特性的研究
DOI：
10.1016/s0169-4332(01)00969-2
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发表时间：
2002
影响因子：
6.7
通讯作者：
K. Matsushige
中科院分区：
文献类型：
--
作者：
N. Satoh;K. Kobayashi;S. Watanabe;T. Fujii;T. Horiuchi;Hirofumi Yamada;K. Matsushige
我们展示了一个微悬臂与锆钛酸铅（PZT）压电薄膜作为一个集成的偏转传感器，动态模式原子力显微镜（AFM）和相关技术，包括扫描近场光学显微镜（SNOM）和开尔文力显微镜（KFM）的应用。在SNOM测量中，由尖端顶点散射的倏逝光通过悬臂的锥形中空尖端透射，并且由放置在共焦布置中的光电检测器检测。此外，铁电薄膜的局部表面电位映射KFM使用调频（FM）检测方法。局部极化的铁电畴的AFM针尖成像的SNOM和KFM。
We demonstrated applications of a microfabricated cantilever with a lead zirconate titanate (PZT) piezoelectric thin film as an integrated deflection sensor to dynamic-mode atomic force microscopy (AFM) and to the related techniques including scanning near-field optical microscopy (SNOM) and Kelvin force microscopy (KFM). In the SNOM measurement, the evanescent light scattered by the tip apex was transmitted through the pyramidal hollow tip of the cantilever and it was detected by a photodetector placed in a confocal arrangement. Furthermore, local surface potential of a ferroelectric film was mapped by KFM using the frequency modulation (FM) detection method. Local poled ferroelectric domains made by the AFM tip were imaged by both SNOM and KFM.
影响因子：
3.3
作者：
H. Aoki;S. Ito
通讯作者：
H. Aoki;S. Ito