Transient calorimetric diagnostics for plasma processing
Transient calorimetric diagnostics for plasma processing
复制标题
等离子体处理的瞬态量热诊断
DOI：
10.1140/epjd/e2013-40148-8
复制
发表时间：
2013
期刊：
影响因子：
--
通讯作者：
H. Kersten
中科院分区：
文献类型：
--
作者：
S. Bornholdt;H. Kersten
本文报道了一种改进的量热法，用瞬态技术测定等离子体对基底的能量通量。它提供了在等离子体处理过程中用于表征等离子体-壁相互作用的传统方法的简要概述。讨论了该方法的数学框架和可能的含义。说明了如何改进该方法，以便在更短的测量时间内获得有关能量流的额外和详细信息。为此，通常保持恒定的探头偏置（如果应用）会像Langmuir探头测量一样变化。理论考虑的实验验证强调了该方法在等离子体处理控制中的潜力。最后讨论了无源量热探头在无反馈回路的情况下用于过程监测的连续测量的可能性。
This paper reports on an improvement of the calorimetric method for the determination of energy fluxes from plasma towards substrates by using a transient technique. It provides a short overview of the traditional method used for characterization of plasma-wall-interactions during plasma processing. The mathematical framework of the method and possible implications are discussed. It is shown how the method can be improved to obtain additional and detailed information about the energy influx in a shorter measurement time. For this purpose, the probe bias (if applied), which has commonly been kept constant is varied like in Langmuir probe measurements. The experimental validation of the theoretical considerations emphasizes the potential of the method for control in plasma processing. The possibility how the passive calorimetric probe can be used in continuous measurements for process monitoring without any feedback loops used by other probes, is finally discussed.
影响因子：
5.4
作者：
Buhagiar, Joseph;Qian, Linmao;Dong, Hanshan
通讯作者：
Dong, Hanshan