Vacuum sealed ultra miniature fiber-optic pressure sensor using white light interferometry
Vacuum sealed ultra miniature fiber-optic pressure sensor using white light interferometry
复制标题
采用白光干涉测量法的真空密封超微型光纤压力传感器
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
M. Esashi
中科院分区：
文献类型：
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作者：
K. Totsu;Y. Haga;M. Esashi
我们研制了一种直径125 /spl μ m的光纤法布里-珀罗干涉仪压力传感器，其腔体密封在真空中。白光干涉测量是为了避免光纤弯曲和光源波动引起的噪声。反射光由高速光谱仪测量。在光纤端形成法布里-珀罗腔。压力引起的膜片变形改变了空腔的长度。为避免温度变化对传感器输出的影响，腔体采用真空密封。传感元件在真空中通过焊接连接到光纤端。在传感元件的金属垫片上形成锡层，并与光纤端图案化的Cr/Cu/Au层结合。为了制作干涉仪，在光纤端部的核心处还设计了Cr半反射镜。利用传感器系统成功地实时监测了压力。
We have developed a fiber-optic Fabry-Perot interferometer pressure sensor of 125 /spl mu/m in diameter of which cavity is sealed in vacuum. White light interferometry is used to avoid noise caused by bending of the optical fiber and a fluctuation of the light source. The reflection light is measured by high-speed spectrometer. A Fabry-Perot cavity is formed at the optical fiber end. A deformation of the diaphragm induced by pressure varies the cavity length. To avoid influence of temperature change to the sensor output, the cavity is sealed in vacuum. The sensing element is bonded to the optical fiber end by soldering in vacuum. Sn layer is formed on the metal spacer of the sensing element and is bonded to the Cr/Cu/Au layer patterned at the optical fiber end. Cr half-mirror is also patterned at the core of the fiber end for making interferometer. Pressure is successfully monitored in real-time using the sensor system.