The Vertical Traverse Stage in Vacuum Condition
The Vertical Traverse Stage in Vacuum Condition
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真空状态下的垂直移动台
DOI：
10.1299/jsmec1988.33.61
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发表时间：
1990
期刊：
影响因子：
--
通讯作者：
Makoto Higomura
中科院分区：
文献类型：
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作者：
Masaru Ohtsuka;M. Furukawa;Makoto Higomura
为同步辐射 (SR) 中的 X 射线步进机应用开发了垂直横向晶圆定位台作为 X 射线源。为了确保真空/低压氦气条件下的高精度运动，平台结构分为粗步进平台和精定位平台。对于粗步进阶段，开发了带有非接触式密封装置的线性空气静压轴承（LAB）以避免润滑问题。对于精细定位平台，开发了采用多轴板簧引导和压电致动器的平台以获得高刚性。每个非接触式密封装置的漏气率小于5.7x10-4 Pa·m3/sec，使真空室压力达到3 x 10-3 Pa。粗步进平台上的实验表明，俯仰、偏航等旋转运动误差小于±6μrad，重复性小于±1μrad。多轴精定位平台也被证明具有足够小的移动误差。
A vertical traverse wafer positioning stage was developed for X-ray stepper application in synchrotron radiation (SR) as an X-ray source. To ensure high accuracy of movement in vacuum /low-pressure helium conditions, the stage construction was split up into a coarse stepping stage and a fine positioning stage. For the coarse stepping stage, a linear air hydrostatic bearing (LAB) with a noncontact sealing device was developed to avoid lubrication problems. For the fine positioning stage, a multiaxis leaf spring guided and piezoelectric actuators employed stage was developed to attain high rigidity. The air leakage rate from each noncontact sealing device was less than 5.7x10-4 Pa·m3/sec, so that the pressure of the vacuum chamber could reach 3 x 10-3 Pa. Experiments on the coarse stepping stage show rotational movement error such as pitching and yawing to be less than ±6μrad with a repeatability of less than ±1μrad. The multiaxis fine positioning stage is also proved to have a sufticient small movement error.