Stability of metal/GaAs-lnterfaces: A phase diagram survey

Stability of metal/GaAs-lnterfaces: A phase diagram survey
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金属/GaAs 界面的稳定性:相图调查

DOI:
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发表时间:
1988
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影响因子:
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通讯作者:
R. Schmid
R. Schmid
中科院分区:
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文献类型:
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作者:
R. Schmid

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本文给出了Ga-As-金属三元系Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Re、Os、Rh、Ir、Ni、Pd、Pt、Cu、Ag和Au的相图。预测计算是基于以下简化:三元相和固溶度被忽略,二元化合物的生成吉布斯能由生成焓估计,并从Miedema模型计算。预测的图表与实验数据吻合得令人惊讶,它们可能对数据缺乏或不完整的许多情况下有用。的相图和热力学数据被证明是一个强大的工具,用于理解的界面反应的金属接触到GaAs,因此为改进的接触材料的发展。
Calculated phase diagrams of ternary Ga-As-metal systems for the metals Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Re, Os, Rh, Ir, Ni, Pd, Pt, Cu, Ag and Au are presented. The predictive calculations are based on the following simplifications: Ternary phases and solid solubilities are disregarded and the Gibbs energy of formation of binary compounds is estimated by the enthalpy of formation and calculated from Miedema’s model. The predicted diagrams agree surprisingly well with experimental data and they may be useful for the many cases where data are lacking or fragmentary. The phase diagrams and the thermodynamic data are shown to be a powerful tool for the understanding of interface reactions of metallic contacts to GaAs and hence for the development of improved contact materials.