A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC
A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC
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用于全集成升压 DC/DC 的两种微机械电感器（条形和曲折形）的比较
DOI：
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发表时间：
1996
期刊：
影响因子：
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通讯作者：
M. Allen
中科院分区：
文献类型：
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作者：
C. Ahn;M. Allen
两个微机械集成电感器（酒吧和曲折型）实现在硅晶片上，通过使用修改后的，IC兼容的，多层金属化技术。通过使用厚的电镀导体、芯和通孔，努力使线圈电阻和磁阻最小化。在条型电感器中，25 μ m厚的镍铁坡莫合金磁芯条被30 μ m厚的多层铜导线包裹。对于具有33匝多级线圈的4 mm/spl倍/1.0 mm/spl倍/110 /spl μ/m厚度的电感器尺寸，在1 MHz下实现的比电感约为30 nH/mm/sup 2/。在该曲折型电感器中，导线和磁芯的角色被切换，即，磁芯缠绕在导线上。该电感器尺寸为4 mm/spl倍/1.0 mm/spl倍/130 /spl μ/m，由30匝35-spl μ/m厚的镍铁坡莫合金磁芯围绕10-spl μ/m厚的溅射铝导线组成。在1 MHz的频率下实现了35 nH/mm/sup 2/的比电感。使用这两个电感器，开关DC/DC升压转换器的混合方式证明。在开关频率为300 kHz、占空比为50%的情况下，两种电感的最大输出电压约为输入电压3 V的两倍，证明了这些集成平面电感的实用性。
Two micromachined integrated inductors (bar- and meander-type) are realized on a silicon wafer by using modified, IC-compatible, multilevel metallization techniques. Efforts are made to minimize both the coil resistance and the magnetic reluctance by using thick electroplated conductors, cores, and vias. In the bar-type inductor, a 25-/spl mu/m thick nickel-iron permalloy magnetic core bar is wrapped with 30-/spl mu/m thick multilevel copper conductor lines. For an inductor size of 4 mm/spl times/1.0 mm/spl times/110 /spl mu/m thickness having 33 turns of multilevel coils, the achieved specific inductance is approximately 30 nH/mm/sup 2/ at 1 MHz. In the meander-type inductor, the roles of conductor wire and magnetic core are switched, i.e., a magnetic core is wrapped around a conductor wire. This inductor size is 4 mm/spl times/1.0 mm/spl times/130 /spl mu/m and consists of 30 turns of a 35-/spl mu/m thick nickel-iron permalloy magnetic core around a 10-/spl mu/m thick sputtered aluminum conductor lines. A specific inductance of 35 nH/mm/sup 2/ is achieved at a frequency of 1 MHz. Using these two inductors, switched DC/DC boost converters are demonstrated in a hybrid fashion. The obtained maximum output voltage is approximately double an input voltage of 3 V at switching frequencies of 300 kHz and a duty cycle of 50% for both inductors, demonstrating the usefulness of these integrated planar inductors.