X‐ray diffraction from laterally structured surfaces: Crystal truncation rods
X‐ray diffraction from laterally structured surfaces: Crystal truncation rods
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横向结构化表面的 X 射线衍射：晶体截断棒
DOI：
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发表时间：
1994
期刊：
影响因子：
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通讯作者：
J. Kotthaus
中科院分区：
文献类型：
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作者：
M. Tolan;W. Press;F. Brinkop;J. Kotthaus
提出了单晶 GaAs(001) 表面光栅的 X 射线衍射测量结果。实验是使用三晶衍射仪进行的。对五个样品的 (004) 布拉格反射附近进行了详细研究。基于运动学晶体截断杆理论的模型计算能够定量解释所有测量结果。通过数据拟合获得了样品的介观光栅参数以及微观表面粗糙度。拍摄了三个样品的扫描电子显微镜照片。对这些图片的分析得出了与 X 射线布拉格衍射获得的相同的介观参数。
X‐ray‐diffraction measurements from single‐crystalline GaAs(001) surface gratings are presented. The experiments were performed using a three‐crystal diffractometer. The vicinity of the (004) Bragg reflection for five samples was investigated in detail. Model calculations based on the kinematical crystal truncation rod theory are able to explain all measurements quantitatively. Mesoscopic grating parameters as well as microscopic surface roughnesses of the samples were obtained from fits of the data. For three samples scanning electron microscope pictures were taken. The analysis of these pictures leads to the same mesoscopic parameters as obtained from x‐ray Bragg diffraction.