Silicon-doped β -Ga 2 O 3 films grown at 1 µ m/h by suboxide molecular-beam epitaxy
Silicon-doped β -Ga 2 O 3 films grown at 1 µ m/h by suboxide molecular-beam epitaxy
复制标题
通过低氧化物分子束外延以 1 µ m/h 的速度生长硅掺杂 β -Ga 2 O 3 薄膜
DOI:
10.1063/5.0139622
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发表时间:
2023
期刊:
影响因子:
6.1
通讯作者:
Steele, Jacob
中科院分区:
文献类型:
--
作者:
Azizie, Kathy;Hensling, Felix V.;Gorsak, Cameron A.;Kim, Yunjo;Pieczulewski, Naomi A.;Dryden, Daniel M.;Senevirathna, M. K.;Coye, Selena;Shang, Shun-Li;Steele, Jacob