Thermal conductivity of diamond-like carbon films

Thermal conductivity of diamond-like carbon films
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DOI:
10.1063/1.2362601
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发表时间:
2006-10-16
影响因子:
4
通讯作者:
Ferrari, A. C.
Ferrari, A. C.
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Shamsa, M.;Liu, W. L.;Ferrari, A. C.

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作者报道了从聚合氢化非晶碳(a-C:H)到四面体非晶碳(ta-C)的各种碳膜的热导率(K)。使用3 Ω方法进行测量。结果表明,热传导是由sp(3)相的数量和结构无序。如果sp(3)相是无定形的,则K与C-C sp(3)含量、密度和弹性常数成线性比例。聚合物和石墨膜具有最低的K(0.2- 0.3W/mK),氢化ta-C:H具有类似于lW/mK的K,并且ta-C具有最高的K(3.5W/mK)。如果sp(3)相有序,即使在诸如微米或纳米金刚石的小颗粒中,对于给定的密度、杨氏模量和sp(3)含量,也会发生强烈的K增加。(c)2006年,美国物理学会。
The authors report the thermal conductivity (K) of a variety of carbon films ranging from polymeric hydrogenated amorphous carbons (a-C:H) to tetrahedral amorphous carbon (ta-C). The measurements are performed using the 3 omega method. They show that thermal conduction is governed by the amount and structural disorder of the sp(3) phase. If the sp(3) phase is amorphous, K scales linearly with the C-C sp(3) content, density, and elastic constants. Polymeric and graphitic films have the lowest K (0.2-0.3 W/mK), hydrogenated ta-C:H has K similar to 1 W/mK, and ta-C has the highest K (3.5 W/mK). If the sp(3) phase orders, even in small grains such as in micro- or nanodiamond, a strong K increase occurs for a given density, Young's modulus, and sp(3) content. (c) 2006 American Institute of Physics.