Evaluation of top, angle, and side cleaned FIB samples for TEM analysis
Evaluation of top, angle, and side cleaned FIB samples for TEM analysis
复制标题
DOI：
10.1002/jemt.20514
复制
发表时间：
2007-12-01
影响因子：
2.5
通讯作者：
van Tendeloo, Gustaaf
中科院分区：
文献类型：
--
作者：
Montoya, Eduardo;Bals, Sara;van Tendeloo, Gustaaf
采用内提拉式FIB技术制备了LaAlO_3/SrTiO_3多层膜样品。使用5 kV的Ga+1束，进行最终清洁步骤，产生顶部、顶角、侧面和底角清洁。不同的清洗程序，这可以很容易地实现在一个双光束FIB系统中，进行了描述和比较;所有的清洗类型产生薄lamerals，有用的HRTEM和HAADF-STEM工作到原子分辨率。然而，顶部清洁laminates强烈影响的窗帘效果。顶角清洁试样显示约5纳米的非晶层在试样表面，由于损坏和再沉积。此外，据观察，LaAlO 3层优先被破坏，并转化为非晶材料，在减薄过程中。
ITEM specimens of a LaAlO3/SrTiO3 multilayer are prepared by FIB with internal lift out. Using a Ga+1 beam of 5 kV, a final cleaning step yielding top, top-angle, side, and bottom-angle cleaning is performed. Different cleaning procedures, which can be easily implemented in a dual beam FIB system, are described and compared; all cleaning types produce thin lamellae, useful for HRTEM and HAADF-STEM work up to atomic resolution. However, the top cleaned lamellae are strongly affected by the curtain effect. Top-angle cleaned specimens show an amorphous layer of around 5 nm at the specimen surfaces, due to damage and redeposition. Furthermore, it is observed that the LaAlO3 layers are preferentially destroyed and transformed into amorphous material, during the thinning process.