A Collective Laser Thomson Scattering System for Diagnostics of Laser-Produced Plasmas for Extreme Ultraviolet Light Sources
A Collective Laser Thomson Scattering System for Diagnostics of Laser-Produced Plasmas for Extreme Ultraviolet Light Sources
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DOI：
10.7567/apex.6.076101
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发表时间：
2013-07-01
影响因子：
2.3
通讯作者：
Uchino, Kiichiro
中科院分区：
文献类型：
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作者：
Tomita, Kentaro;Nakayama, Kazuki;Uchino, Kiichiro
为了开发一种用于极紫外（EUV）光源的激光等离子体诊断系统，将集体激光汤姆逊散射（LTS）应用于激光产生的碳等离子体，以测量等离子体的电子密度（n（e））和电子温度（T-e）等参数。获得了具有EUV光源所需参数（n（e）= 10（24）-10（25）m（-3），T-e = 30-50 eV）的等离子体，并且这些参数成功地由中试诊断系统评估，误差小于10%。根据这些结果，设计了一个LTS系统，用于诊断真实的EUV光源的锡等离子体。(C)2013日本应用物理学会
To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (n(e)) and electron temperature (T-e). Plasmas having parameters necessary for an EUV light source (n(e) = 10(24)-10(25) m(-3), T-e = 30-50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed. (C) 2013 The Japan Society of Applied Physics