Commercial helium permeation leak standards: Their properties and reliability
Commercial helium permeation leak standards: Their properties and reliability
复制标题
DOI：
10.1116/1.579935
复制
发表时间：
1996-05-01
影响因子：
2.9
通讯作者：
Tison, SA
中科院分区：
文献类型：
--
作者：
Abbott, PJ;Tison, SA
标准泄漏或泄漏伪影广泛用于工业和研究环境中，通常用于氦检漏仪的校准。最常用的泄漏是氦渗透型，它使用玻璃、石英或聚合物屏障通过扩散来限制氦气的流动。另一方面，物理泄漏使用物理限制元件来限制流量。本文将根据八年累积的校准数据讨论氦渗透标准漏孔的特性和可靠性。物理氦泄漏不会被讨论，因为在国家标准与技术研究院校准的氦泄漏相对较少。
Standard leaks or leak artifacts are used extensively in industrial and research environments, typically for the calibration of helium leak detectors. The most commonly used leak is the helium permeation type, which uses a glass, quartz, or polymer barrier to restrict the flow of helium via diffusion. Physical leaks, on the other hand, use a physically restrictive element to limit the flow. This article will discuss the properties and reliability of helium permeation standard leaks, based on eight years of accumulated calibration data. Physical helium leaks will not be discussed since relatively few have been calibrated at the National Institute of Standards and Technology.