Imaging Ferroelectric Nanodomains in Strained BiFeO3 Nanoscale Films Using Scanning Low-Energy Electron Microscopy: Implications for Low-Power Devices
Imaging Ferroelectric Nanodomains in Strained BiFeO3 Nanoscale Films Using Scanning Low-Energy Electron Microscopy: Implications for Low-Power Devices
复制标题
使用扫描低能电子显微镜对应变 BiFeO3 纳米级薄膜中的铁电纳米域进行成像：对低功耗器件的影响
DOI：
10.1021/acsanm.1c00204
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发表时间：
2021
影响因子：
5.9
通讯作者：
Chen Deyang
中科院分区：
文献类型：
--
作者：
Ma Haili;Mikmekova Sarka;Konvalina Ivo;Yin Xiaozhe;Sun Fei;Pinos Jakub;Vaskovicova Nadezda;Prucha Lukas;Mullerova Ilona;Mikmekova Eliska Materna;Chen Deyang
由于有可能促进下一代低能耗纳米电子元件的发展，因此在纳米尺度上精确控制铁电和多铁畴态具有相当大的意义。该领域的进展与空间分辨表征方法的进展密切相关。在这方面，扫描电子显微镜（SEM）作为一种功能强大且高度通用的成像技术，具有多样化的内部探测器，在尺度桥接显微镜研究（从微米到纳米）方面具有巨大的潜力。本文首次利用表面敏感扫描低能电子显微镜（SLEEM）同时获得了菱形(R)和t混合相bifeo3纳米薄膜中四边形(T)相的相变化和有序铁电纳米畴。特别是背散射电子（BSE）信号带来了丰富的极化信息，可以用来识别混合相bifeo3纳米级薄膜中的极化差异。结果表明，纳米畴的极化对比度随低损耗bse的比例增加而增加。电子轨迹模拟使我们能够在存在减速场的情况下优化和分离角度选择性bse成像的形态和极化对比度。SLEEM结合了其他纳米表征和制造技术，如三维（3D）原子探针断层扫描，为解决复杂的纳米物理和铁电纳米材料的缺陷化学开辟了新的机会。
Precise control of ferroelectric and multiferroic domain states at the nanoscale is of considerable interest due to the potential to boost the development of next-generation low-energy-consumption nanoelectronic components. Progress in this field is closely related to advances in spatially resolved characterization methods. In this regard, scanning electron microscopy (SEM) as a powerful and highly versatile imaging technique with diversified inner detectors possesses huge potential for scale-bridging microscopy studies (spanning from micrometers to nanometers). Here, both the phase variants and the ordered ferroelectric nanodomains of the tetragonal-like (T) phase in the rhombohedral-like (R) andTmixed-phase BiFeO3nanoscale film are acquired simultaneously using the surface-sensitive scanning low-energy electron microscopy (SLEEM) for the first time. In particular, backscattered electron (BSE) signals, which bring abundant polarization information, can be utilized to discern polarized discrepancy in mixed-phase BiFeO3nanoscale films. Furthermore, it is demonstrated that the polarization contrast of nanodomains increases with increasing ratio of the low-loss BSEs in the collected signal. Electron trajectories simulation enables us to optimize and separate morphological and polarization contrast in angle-selective BSEs imaging in the presence of a deceleration field. SLEEM combines with other nanocharacterization and fabrication techniques, such as three-dimensional (3D) atom probe tomography, opening up new opportunities for tackling the complex nanoscale physics and defect chemistry of ferroelectric nanomaterials.