Femtosecond laser-induced periodic surface structures
Femtosecond laser-induced periodic surface structures
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DOI：
10.2351/1.4712658
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发表时间：
2012-09-01
影响因子：
2.1
通讯作者：
Rosenfeld, A.
中科院分区：
文献类型：
--
作者：
Bonse, J.;Krueger, J.;Rosenfeld, A.
从实验和理论上研究了空气环境中不同材料(金属、半导体和电介质)经线偏振飞秒激光脉冲(约30~150飞秒，波长约800 nm)照射后形成的周期性表面结构(LIPSS)。在金属中，主要是低空间频率的LIPSS，其周期接近激光波长，垂直于偏振观察。在特定的辐照条件下，可以产生空间周期小于100 nm的高空间频率LIPSS(类似于波长/10)。对于半导体，从理论和实验上分析了光学性质的瞬时变化对LIPSS周期的影响。在电介质中，使用(多个)双飞秒激光脉冲照射序列实验证明了瞬时激发阶段在LIPSS形成中的重要性。对于小于2ps的双脉冲延迟，观察到LIPSS周期的特征减小。(C)2012年美国激光学会。
The formation of laser-induced periodic surface structures (LIPSS) in different materials (metals, semiconductors, and dielectrics) upon irradiation with linearly polarized fs-laser pulses (tau similar to 30-150 fs, lambda similar to 800 nm) in air environment is studied experimentally and theoretically. In metals, predominantly low-spatial-frequency-LIPSS with periods close to the laser wavelength lambda are observed perpendicular to the polarization. Under specific irradiation conditions, high-spatial-frequency-LIPSS with sub-100-nm spatial periods (similar to lambda/10) can be generated. For semiconductors, the impact of transient changes of the optical properties to the LIPSS periods is analyzed theoretically and experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated experimentally using (multiple) double-fs-laser-pulse irradiation sequences. A characteristic decrease of the LIPSS periods is observed for double-pulse delays of less than 2 ps. (C) 2012 Laser Institute of America.