Optical readout method for microcantilever array sensing and its sensitivity analysis.
Optical readout method for microcantilever array sensing and its sensitivity analysis.
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DOI：
10.1364/ol.32.000594
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发表时间：
2007-03
期刊：
影响因子：
3.6
通讯作者：
Zhengyu Miao;Qingchuan Zhang;Z. Guo;Xiaoping Wu;Dapeng Chen
中科院分区：
文献类型：
--
作者：
Zhengyu Miao;Qingchuan Zhang;Z. Guo;Xiaoping Wu;Dapeng Chen
建立了一种基于刀口滤波器的双材料微悬臂梁阵列弯曲检测光学读出平台，讨论了应力诱导的微悬臂梁变形对光检测灵敏度的影响。变形的影响进行了理论建模和实验验证。分析表明，当反射镜变形λ/5（λ为读出光的波长）时，光学探测灵敏度将下降50%。最后，通过该平台获得红外图像。
An optical readout platform using a knife-edge filter for detecting the bending of a bimaterial microcantilever array is established, and the influence of stress-induced micromirror deformation on the optical detection sensitivity is discussed. The influence of deformation is modeled theoretically and validated experimentally. Analysis shows that the optical detection sensitivity will decrease by 50% when the mirror has a deformation of lambda/5 (lambda is the wavelength of readout light). Finally, an infrared image is obtained by the platform.