Characterization of the erosion plume after ablation of copper and tantalum targets by excimer laser irradiation
Characterization of the erosion plume after ablation of copper and tantalum targets by excimer laser irradiation
复制标题
准分子激光照射烧蚀铜和钽靶材后侵蚀羽流的表征
DOI：
10.1063/1.1594274
复制
发表时间：
2003
影响因子：
3.2
通讯作者：
E. Filippova
中科院分区：
文献类型：
--
作者：
O. Novodvorsky;O. Khramova;C. Wenzel;J. Bartha;E. Filippova
用朗缪尔探针和发射光谱研究了真空中准分子激光（308 nm）烧蚀铜和钽靶产生的烧蚀羽流。离子和电子探针电流的范围内的能量密度从0.2到2.2 J/cm 2的探针到目标的距离从10到133 mm的目标。从飞行时间测量计算的离子速度分布已被揭示为一种多模态的。得到了真实的时间和空间的电子探针电流曲线。不同羽流区域的电子温度是根据朗缪尔探针与目标之间不同距离处拍摄的一系列I-U特征来确定的。结果表明，羽流电子温度是不均匀的，在羽流前方有一个极大值。利用光学发射光谱对羽流成分进行了定性研究。此外，光学发射光谱允许我们测量两个T…
The erosion plume resulting from ablation of copper and tantalum targets in vacuum with excimer laser irradiation (308 nm) was studied using Langmuir probe and optical emission spectroscopy. The ion and electron probe currents were obtained in the range of energy densities from 0.2 to 2.2 J/cm2 at the target with a probe-to-target distance from 10 to 133 mm. The ion velocity distribution calculated from the time-of-flight measurements has been revealed as a multimodal kind. Curves of the spatial and time dependence of electron probe current were obtained in real time. The electron temperature of different plume regions was determined from a series of I-U characteristics taken at different distances between the Langmuir probe and target. It was established that the plume electron temperature is nonuniform and it has a maximum in front of the plume. The optical emission spectra were used to study the plume composition qualitatively. In addition, the optical emission spectroscopy allowed us to measure both t...