Convenient Preparation of High-Quality Specimens for Annealing Experiments in the Transmission Electron Microscope

Convenient Preparation of High-Quality Specimens for Annealing Experiments in the Transmission Electron Microscope
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DOI:
10.1017/s1431927614013476
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发表时间:
2014-12-01
影响因子:
2.8
通讯作者:
Dunin-Borkowski, Rafal E.
Dunin-Borkowski, Rafal E.
中科院分区:
工程技术4区
文献类型:
--
作者:
Duchamp, Martial;Xu, Qiang;Dunin-Borkowski, Rafal E.

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介绍了一种基于聚焦离子束球磨和原位提拉的高质量样品制备方法,用于在透射电子显微镜上进行原位退火实验。该程序允许使用低离子能量和背面铣削直接在加热芯片上清洁电子透明薄片,以将再沉积和损害降至最低。以Al-Mn-Fe复合金属合金试件的制备为例说明了该方法的可行性。
A procedure based on focused ion beam milling and in situ lift-out is introduced for the preparation of high-quality specimens for in situ annealing experiments in the transmission electron microscope. The procedure allows an electron-transparent lamella to be cleaned directly on a heating chip using a low ion energy and back-side milling in order to minimize redeposition and damage. The approach is illustrated through the preparation of an Al-Mn-Fe complex metallic alloy specimen.