Nanopore Fabrication of Two-Dimensional Materials on SiO2 Membranes Using He Ion Microscopy
Nanopore Fabrication of Two-Dimensional Materials on SiO2 Membranes Using He Ion Microscopy
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DOI：
10.1109/tnano.2018.2840721
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发表时间：
2018-05
影响因子：
2.4
通讯作者：
Takumi Hayashi;Kenta Arima;Naoki Yamashita;Seongsu Park;Zhipeng Ma;O. Tabata;K. Kawai
中科院分区：
文献类型：
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作者：
Takumi Hayashi;Kenta Arima;Naoki Yamashita;Seongsu Park;Zhipeng Ma;O. Tabata;K. Kawai
具有直径为几纳米的孔的结构可用于区分DNA中的核苷酸。一种二维材料，如薄膜，有望提高精确的分子识别。在这里，我们提出了纳米孔制造薄的2-D膜使用氦离子显微镜（HIM）。我们将三种2-D材料，化学气相沉积（CVD）石墨烯，CVD氮化硼和剥离MoS 2转移到硅衬底上的独立SiO2膜的亚微米孔中。通过拉曼光谱和X射线光电子能谱确认了2-D材料的原子层的数目。我们检查了纳米孔制造的可重复性和准确性与HIM系统焦点位置和光束照射强度的函数关系。通过优化强度和焦点位置，实现了直径小于10 nm的可再现纳米孔。我们使用这种HIM技术在单层石墨烯中实现了1.5 nm直径的纳米孔。
Structures with pores having diameters of several nanometers can be used for distinguishing nucleotides in DNA. A 2-D material such as a thin membrane is expected to enhance precise molecule recognition. Here, we present the nanopore fabrication to thin 2-D membranes using He ion microscopy (HIM). We transferred three 2-D materials, chemical vapor deposition (CVD) graphene, CVD boron nitride, and peel-off MoS2, to the submicrometer pore of freestanding SiO2 membranes on a silicon substrate. The number of atomic layers of the 2-D materials was confirmed via Raman spectroscopy and X-ray photoelectron spectroscopy. We examined the reproducibility and accuracy of nanopore fabrication as a function of the focal position and beam irradiation intensity of the HIM system. Reproducible nanopores having diameters of less than 10 nm were realized by optimizing the intensity and focal position. We achieved 1.5-nm-diameter nanopores in a single layer of graphene using this HIM technique.