Switch-Matrix-Based High-Density Microelectrode Array in CMOS Technology

Switch-Matrix-Based High-Density Microelectrode Array in CMOS Technology
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DOI:
10.1109/jssc.2009.2035196
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发表时间:
2010-02-01
影响因子:
5.4
通讯作者:
Hierlemann, Andreas
Hierlemann, Andreas
中科院分区:
工程技术1区
文献类型:
--
作者:
Frey, Urs;Sedivy, Jan;Hierlemann, Andreas

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我们报告了一种基于CMOS的微电极阵列(MEA),具有11,011个金属电极和126个通道,每个通道包括记录和刺激电子器件,用于与生电细胞(如神经元或心肌细胞)进行细胞外双向通信。其重要特征包括:(i)在(亚)细胞水平上的高空间分辨率,每mm(2)具有3150个电极(电极直径7 μ m,电极间距18 μ m);(ii)记录位点到126个通道的可重新配置的路由;以及(iii)低噪声水平。
We report on a CMOS-based microelectrode array (MEA) featuring 11,011 metal electrodes and 126 channels, each of which comprises recording and stimulation electronics, for extracellular bidirectional communication with electrogenic cells, such as neurons or cardiomyocytes. The important features include: (i) high spatial resolution at (sub) cellular level with 3150 electrodes per mm(2) (electrode diameter 7 mu m, electrode pitch 18 mu m); (ii) a reconfigurable routing of the recording sites to the 126 channels; and (iii) low noise levels.