Densely packed pie shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation
Densely packed pie shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation
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DOI：
10.1109/68.841253
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发表时间：
2000-05
影响因子：
2.6
通讯作者：
Young-Gu Ju;D. Lofgreen;A. Fiore;Syn-Yem Hu;E. Hegblom;D. Louderback;O. Sjolund;A. Huntington;L. Coldren
中科院分区：
文献类型：
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作者：
Young-Gu Ju;D. Lofgreen;A. Fiore;Syn-Yem Hu;E. Hegblom;D. Louderback;O. Sjolund;A. Huntington;L. Coldren
波分复用 (WDM) 光子集成发射器 (PIE) 垂直腔表面发射激光器 (VCSEL) 阵列采用生长后湿氧化技术制造。通过结合一维氧化和大规模锥形氧化技术，可以实现WDM VCSEL阵列的高密度集成。八个通道集成成一个直径为 60 /spl mu/m 的圆。发现七个通道可作为激光器运行。激光波长范围为 823 至 836 nm，与 VCSEL 台面和调谐沟槽之间的距离相对应。将湿式氧化结合到 PIE VCSEL 阵列的波长控制中的成功演示开辟了一种制造掩模定义的密集 WDM VCSEL 阵列的新方法。
Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 /spl mu/m in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.