Nanoscale material redistribution induced by spatially modulated femtosecond laser pulses for flexible high-efficiency surface patterning
Nanoscale material redistribution induced by spatially modulated femtosecond laser pulses for flexible high-efficiency surface patterning
复制标题
由空间调制飞秒激光脉冲引起的纳米级材料重新分布，用于灵活的高效表面图案化
DOI：
10.1364/oe.25.031431
复制
发表时间：
2017-12-11
期刊：
影响因子：
3.8
通讯作者：
Lu, Yongfeng
中科院分区：
文献类型：
--
作者：
Wang, Andong;Jiang, Lan;Lu, Yongfeng
本文研究了空间调制飞秒激光脉冲在硅表面控制的材料再分布现象。通过使用空间光调制器对强度分布进行整形。材料首先被选择性熔化，然后被激光诱导等离子体重新分布。因此，形成与激光强度分布共形的复杂表面图案。由于纳米级材料的重新分布，可以实现亚衍射极限尺寸。在表面图案化过程中仅需要一个脉冲，从而大大有利于效率的提高。与多光束干涉相结合，可以以1600 μ m（2）/脉冲的高效率制造大规模的纳米结构阵列。这种方法为纳米级表面图案化应用提供了一种简单、灵活和有效的替代方法。(C)2017美国光学学会
In this paper, we investigated the material redistribution phenomenon controlled by spatially modulated femtosecond laser pulses on a silicon surface. The intensity distribution was shaped by using a spatial light modulator. The material was first selectively melted and then redistributed by the laser-induced plasma. Thus, complex surface patterns were formed conformal to the laser intensity distribution. Sub-diffraction-limit size can be achieved due to the nanoscale material redistribution. Only one pulse was needed in the surface patterning process, thus greatly favoring the efficiency improvement. Combined with multibeam interference, a large-scale nanostructure array can be fabricated with high efficiency of 1600 mu m(2)/pulse. This method offers a simple, flexible and efficient alternative approach for nanoscale surface patterning applications. (C) 2017 Optical Society of America