A thermally-actuated latching MEMS switch matrix and driver chip for an automated distribution frame
A thermally-actuated latching MEMS switch matrix and driver chip for an automated distribution frame
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DOI：
10.1016/j.mechatronics.2016.05.011
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发表时间：
2016-12-01
期刊：
影响因子：
3.3
通讯作者：
Doutreloigne, Jan
中科院分区：
文献类型：
--
作者：
Dellaert, Dries;Doutreloigne, Jan
本文提出了一种热致动锁存MEMS开关矩阵以及用于控制这些开关的集成驱动芯片。新型热致动器通过利用结构下方的多晶硅加热器来加热，这导致更稳定的致动和便利的驱动。所设计的驱动器可以产生可调的锁存波形，需要将开关锁存到闭合或打开状态。由于MEMS开关中的热致动器需要高达24V的电压，所以使用ON Semiconductor的高压0.35 μ m I3T50技术来制造该器件。该驱动器尺寸为2 x 2 mm（2），包含32个输出驱动器，可控制4 x 4锁存开关矩阵。将该驱动器芯片与闩锁MEMS开关组合在一起，以创建原型2 x 2双刀单掷闩锁MEMS开关矩阵。所提出的MEMS开关矩阵可用于固定接入电信网络中，其中它可以实现用于连接双绞线的紧凑的自动配线架。(C)2016爱思唯尔有限公司版权所有。
This paper presents a thermally-actuated latching MEMS switch matrix together with an integrated driver chip for controlling these switches. The novel thermal actuators are heated by making use of a polysilicon heater underneath the structure, which results in a more stable actuation and a facilitated driving. The designed driver can generate adjustable latching waveforms which are needed to latch the switch into a closed or open state. As the thermal actuators in the MEMS switch require voltages up to 24V, the high-voltage 0.35 mu m I3T50 technology of ON Semiconductor was used to fabricate the device. The driver, measuring 2 x 2 mm(2), contains 32 output drivers and can control a 4 x 4 latching switch matrix. This driver chip together with the latching MEMS switches were combined to create a prototype 2 x 2 double pole single-throw latching MEMS switch matrix. The proposed MEMS switch matrix could be used in the fixed-access telecommunication network in which it can implement a compact automated distribution frame for connecting twisted pairs. (C) 2016 Elsevier Ltd. All rights reserved.