Modeling, fabrication, and characterization of tungsten silicide wire-grid polarizer in infrared region.
Modeling, fabrication, and characterization of tungsten silicide wire-grid polarizer in infrared region.
复制标题
红外区域硅化钨线栅偏振器的建模、制造和表征。
DOI：
10.1364/ao.47.004735
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发表时间：
2008
期刊：
影响因子：
1.9
通讯作者：
M. Saito
中科院分区：
文献类型：
--
作者：
I. Yamada;J. Nishii;M. Saito
我们设计并制造了硅化钨线栅偏振器。为了检查其偏振特性，利用有效介质理论模拟了偏振器的透射光谱。根据模拟结果制造了偏振器。所制备的偏光片在5μm波长范围内横向磁（TM）偏振透过率大于50%，在红外范围内TM与横向电透过率之比大于100（20dB）。与传统的红外偏振片相比，这种制造的偏振片具有更高的耐用性和与微加工工艺更好的兼容性。
We designed and fabricated a tungsten silicide wire-grid polarizer. To examine its polarization characteristics, the transmission spectra of the polarizer were simulated using the effective medium theory. The polarizer was fabricated based on the simulation results. The transverse magnetic (TM) polarization transmittance of the fabricated polarizer was greater than 50% over the 5 mum wavelength, and the ratio of TM and transverse electric transmittance was greater than 100 (20 dB) in the infrared range. This fabricated polarizer has higher durability and better compatibility with microfabrication processes than conventional infrared polarizers.