Strain-induced oxide decomposition at SiO2/Si(001) and SiO2/Si(111) interfaces studied by X-ray photoelectron spectroscopy and scanning tunnelling microscopy

Strain-induced oxide decomposition at SiO2/Si(001) and SiO2/Si(111) interfaces studied by X-ray photoelectron spectroscopy and scanning tunnelling microscopy
复制标题

通过 X 射线光电子能谱和扫描隧道显微镜研究 SiO2/Si(001) 和 SiO2/Si(111) 界面处的应变诱导氧化物分解

DOI:
--
复制
发表时间:
2015
期刊:
影响因子:
--
通讯作者:
and Y. Takakuwa
and Y. Takakuwa
中科院分区:
--
文献类型:
--
作者:
J. Tang;S. Ogawa;A. Yoshigoe;Y. Teraoka;and Y. Takakuwa

文献摘要

相似文献