AZARASHI (Seal) Mechanism for Meso/Micro/Nano Manipulators
AZARASHI (Seal) Mechanism for Meso/Micro/Nano Manipulators
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细观/微米/纳米机械手的AZARASHI（密封）机构
DOI：
10.1007/978-1-84882-991-6_3
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
K. Furutani
中科院分区：
文献类型：
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作者：
K. Furutani
本文论述了AZARASHI（密封）机制。具有三个自由度（DOF）的装置由两个受控电磁体组成，所述两个受控电磁体由两个压电致动器连接，所述压电致动器具有产生恒定摩擦的电磁体。在受控电磁体处的摩擦是交替的。整个装置通过使压电致动器变形而蠕动。为了在整个变形范围内实现高分辨率的位移控制，提出了一种利用电流脉冲驱动的压电驱动器位移控制方法。在前馈控制中，由电流脉冲驱动的滞后和非线性比由电压线性放大器驱动的滞后和非线性小得多。并将其应用于一个纳米级单自由度装置的伸缩机构的驱动方法中。介绍了在机械手定位平台中的应用。
This article deals with AZARASHI (Seal) mechanism. A device with three degrees of freedom (DOFs) consists of two controlled electromagnets connected by two piezoelectric actuators with an electromagnet that generates a constant friction. The friction at the controlled electromagnets is alternated. The whole device wriggles by deforming the piezoelectric actuators. A displacement control method of the piezoelectric actuator by driving with a series of current pulses is developed for the high resolution throughout the deformable range. In the feed-forward control, the hysteresis and nonlinearity in the drive by the current pulse were much smaller than those by a voltage linear amplifier. It was applied to the driving method of Extension device of a 1-DOF device with nanometeraccuracy. An application to a positioning stage of a manipulator is introduced.