A method for accurate texture determination of thin oxide films by glancing-angle laboratory X-ray diffraction
A method for accurate texture determination of thin oxide films by glancing-angle laboratory X-ray diffraction
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DOI：
10.1107/s1600576714000569
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发表时间：
2014-04
影响因子：
6.1
通讯作者：
A. Garner;M. Preuss;P. Frankel
中科院分区：
文献类型：
--
作者：
A. Garner;M. Preuss;P. Frankel
本文对标准的掠角X射线衍射法进行了改进，使之能准确地测量氧化膜的织构。该技术解决了具有不对称晶胞的多相材料产生的衍射峰重叠以及在掠角织构测量中样品倾斜引起的峰展宽问题。整整两个人？感兴趣的范围被记录为样品取向的函数，并且从拟合的衍射轮廓中提取来自不同晶面的积分强度。这项技术允许从无法分辨的衍射峰绘制极图，并将贡献与相邻的峰分开，从而更准确地表示现有的氧化物纹理。所提出的方法已被用来确定在水中腐蚀试验中生长的3 mm厚的单斜/四方氧化锆层的织构，并通过额外的同步辐射X射线衍射测量得到了验证。
The present article describes a modification to the standard method of glancing- angle X-ray diffraction for accurate measurement of the texture of thin oxide films. The technique resolves the problems caused by overlapping diffraction peaks originating from multiphase materials with asymmetric unit cells and the peak broadening associated with sample tilt during glancing-angle texture measurement. The entire 2? range of interest is recorded as a function of sample orientation, and the integrated intensities from different crystallographic planes are extracted from fitted diffraction profiles. The technique allows for pole figures to be plotted from diffraction peaks that could otherwise not be resolved and separates contributions from neighbouring peaks, leading to a more accurate representation of the existing oxide texture. The proposed method has been used for determining texture in a 3 mm layer of monoclinic/tetragonal zirconium oxide grown during aqueous corrosion testing and has been verified by additional synchrotron X-ray diffraction measurements.