Chemical sensing with micromolded plastic microcantilevers
Chemical sensing with micromolded plastic microcantilevers
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DOI：
10.1109/jmems.2005.851853
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发表时间：
2005-12-01
影响因子：
2.7
通讯作者：
Colton, JS
中科院分区：
文献类型：
--
作者：
McFarland, AW;Colton, JS
本文介绍了微悬臂梁传感器通过注射成型。注射模具设计的新颖之处在于其采用一个浮动半模和一个固定半模，因此仅需要两个表面上的高平坦度（例如，模具的配合表面），而模具的其余部分可被加工成仅中等公差。该模具在整个模具配合表面上保持低于100纳米的平面度误差，这是生产微米和纳米级部件所需的。微米级的杠杆的生产和特点作为一个测试案例。微悬臂梁由三种不同的聚合物材料制成，并具有特殊的可重复性，其测量的第一模式弯曲谐振频率证明。作为生物传感的前体，金硫醇化学传感与注塑成型的杠杆获得的结果也被提出，并显示与文献一致的值。作为一个整体，这项工作表明，通过注塑成型制造的聚合物微悬臂梁部件的机械和功能等同于其硅型对应物，更便宜，更容易制造。
This paper describes microcantilever sensors produced via injection molding. The injection mold design is novel in that it employs one floating and one fixed mold half, hence only necessitating high flatness on two surfaces (e.g., the mating surfaces of the mold), whereas the remainder of the mold can be machined to only moderate tolerances. The mold holds a sub-100 nanometer flatness error over the entire mold mating surfaces, needed to produce micro- and nanoscale parts. Micrometer-scale cantilevers are produced and characterized as a test case. Microcantilevers are fabricated from three different polymeric materials and have exceptional repeatability as evidenced by their measured first-mode bending resonant frequencies. As a precursor to biological sensing, gold-thiol chemical sensing results obtained with the injection-molded cantilevers are also presented and show values that agree with the literature. As a whole, this work shows that the polymeric microcantilever parts fabricated via injection molding are mechanical and functional equivalents to their silicon-type counterparts, and are cheaper and easier to manufacture.