Influence of the fabrication technique on the porous size of the polymer nanoporous antireflection coatings
Influence of the fabrication technique on the porous size of the polymer nanoporous antireflection coatings
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DOI：
10.1364/josab.22.001330
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发表时间：
2005-06
影响因子：
1.9
通讯作者：
Ming Zhao;Zhenyu Yang;Daqing Zhu;Xi Jin;D. Huang
中科院分区：
文献类型：
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作者：
Ming Zhao;Zhenyu Yang;Daqing Zhu;Xi Jin;D. Huang
详细讨论了聚合物纳米多孔薄膜的使用工艺过程。分析了聚合物的分子量、实验温度、实验湿度、常用溶剂的挥发性等工艺条件的影响。研究发现，不同的工艺条件会导致不同的孔隙尺寸。孔径越大，散射损耗越大，薄膜的透过率越低。指出使用低分子量聚合物、提高环境温度、降低湿度和采用低沸点溶剂是获得小孔径和高透射比的关键。
The technological process of the use of polymer nanoporous antireflection film is discussed in detail. The influence of some technological conditions is also analyzed (such as the polymers' molecular weight, experimental temperature, experimental humidity, and the volatility of common solvent). It is found that different technological conditions will lead to the different porous size. The larger the porous size is, the more the scattering loss will be, so the transmission ratio of the film is low. It is indicated that the use of a low-molecular-weight polymer, an increase in the environment temperature, the reduction of the humidity, and the adoption of a low-boiling-point solvent are keys to small porous size and high transmission ratio.