Interdependence between stress and texture in arc evaporated Ti-Al-N thin films
Interdependence between stress and texture in arc evaporated Ti-Al-N thin films
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DOI：
10.1016/j.surfcoat.2006.10.046
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发表时间：
2007-03
影响因子：
5.4
通讯作者：
C. Falub;A. Karimi;M. Ante;W. Kalss
中科院分区：
文献类型：
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作者：
C. Falub;A. Karimi;M. Ante;W. Kalss
采用非原位X射线衍射（Ex-situ XRD）方法对阴极电弧蒸发法在WC-Co和工具钢基体上沉积的TiAlN单层和TiN/TiAlN多层硬质涂层的应力状态和织构进行了表征。对于所有的涂层的压缩残余应力被发现是较高的工具钢上沉积的膜比沉积在WC-Co，这是由于两个基板的线性热膨胀系数的差异。X射线衍射极扫描测量表明，晶粒的优选取向表现出圆柱对称性，但它是相对于样品表面倾斜。随着涂层中残余应力的增加，（002）衍射面的倾斜角也随之增大。不同的机制，可以解释纤维织构和残余应力之间的相互依赖关系进行了讨论。
Ex-situ X-ray diffraction was used to characterize the stress state and texture of TiAlN monolayer and TiN/TiAlN multilayer hard coatings deposited on WC–Co and tool steel substrates using the cathode arc evaporation method. For all coatings the compressive residual stress was found to be higher in the film deposited on tool steel than that deposited on WC–Co; this is due to the difference in the linear thermal expansion coefficient of the two substrates. X-ray diffraction polar scan measurements showed that the preferred orientation of the crystallites exhibits cylindrical symmetry but it is inclined with respect to the sample surface. Moreover, the inclination angle of the (002) diffracting planes increases with the increase of the residual stress in the coating. Different mechanisms that could explain the interdependence between fiber texture and residual stress are discussed.