Ultra-low thermal conductivity in W/Al2O3 nanolaminates
Ultra-low thermal conductivity in W/Al2O3 nanolaminates
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DOI:
10.1126/science.1093711
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发表时间:
2004-02-13
期刊:
影响因子:
56.9
通讯作者:
George, SM
中科院分区:
文献类型:
--
作者:
Costescu, RM;Cahill, DG;George, SM
Atomic layer deposition and magnetron sputter deposition were used to synthesize thin-film multilayers of W/Al2O3. With individual layers only a few nanometers thick, the high interface density produced a strong impediment to heat transfer, giving rise to a thermal conductivity of similar to0.6 watts per meter per kelvin. This result suggests that high densities of interfaces between dissimilar materials may provide a route for the production of thermal barriers with ultra-low thermal conductivity.