Ultra-low thermal conductivity in W/Al2O3 nanolaminates

Ultra-low thermal conductivity in W/Al2O3 nanolaminates
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DOI:
10.1126/science.1093711
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发表时间:
2004-02-13
期刊:
影响因子:
56.9
通讯作者:
George, SM
George, SM
中科院分区:
综合性期刊1区
文献类型:
--
作者:
Costescu, RM;Cahill, DG;George, SM

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采用原子层沉积法和磁控溅射法制备了W/Al 2 O3多层膜。由于每层只有几纳米厚,高界面密度对热传递产生了强烈的阻碍,导致热导率接近0.6瓦每米每开尔文。这一结果表明,不同材料之间的高密度界面可能为生产具有超低热导率的热障提供途径。
Atomic layer deposition and magnetron sputter deposition were used to synthesize thin-film multilayers of W/Al2O3. With individual layers only a few nanometers thick, the high interface density produced a strong impediment to heat transfer, giving rise to a thermal conductivity of similar to0.6 watts per meter per kelvin. This result suggests that high densities of interfaces between dissimilar materials may provide a route for the production of thermal barriers with ultra-low thermal conductivity.