Analysis of a Molten Region on Amorphous Silicon Film By High-Speed Camera and Contactless Temperature Measurement during Atmospheric Pressure Thermal Plasma Jet Annealing
Analysis of a Molten Region on Amorphous Silicon Film By High-Speed Camera and Contactless Temperature Measurement during Atmospheric Pressure Thermal Plasma Jet Annealing
复制标题
大气压热等离子体射流退火过程中非晶硅薄膜熔融区域的高速相机和非接触式温度测量分析
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
and S. Higashi
中科院分区：
文献类型：
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作者：
Y. Mizukawa;H. Hanafusa;and S. Higashi
