Measurement Method of Depth Profile in Polarity-Inverted Layered Structure Using Scanning Nonlinear Dielectric Microscopy with Soft Probe tip
Measurement Method of Depth Profile in Polarity-Inverted Layered Structure Using Scanning Nonlinear Dielectric Microscopy with Soft Probe tip
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软探针扫描非线性介电显微镜测量极性反转层状结构深度剖面的方法
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发表时间:
2018
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通讯作者:
Yasuo Cho
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作者:
Hiroyuki Odagawa;Yohei Tanaka;Yasuo Cho