A CMOS Compatible Traction Stress Sensing Element For Use In High Resolution Tactile Imaging
A CMOS Compatible Traction Stress Sensing Element For Use In High Resolution Tactile Imaging
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用于高分辨率触觉成像的 CMOS 兼容牵引应力传感元件
DOI：
10.1109/sensor.1995.717313
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
G. Kovacs
中科院分区：
文献类型：
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作者：
B. J. Kane;G. Kovacs
已经开发出一种能够分辨点牵引应力的三个独立分量的微观结构。该传感器对外加牵引应力的三个分量均表现出独立的线性响应，在正应力模式下的测量灵敏度为130 mV/(V*kPa)，在两种剪应力模式下的测量灵敏度为26 mV/(V*kPa)。该传感器采用完全兼容CMOS的制造工艺实现，以便将来集成本地处理和控制电路。由于每个元件的尺寸小于300 x 300 /spl mu/m，该传感器结构可以实现高空间分辨率的机器人触觉传感。下面是传感器结构和所需信号处理的描述，包括机械表征数据。
A microstructure capable of resolving the three independent components of a point traction stress has been developed. The sensor exhibits an independent, linear response to each of the three components of an applied traction stress with measurement sensitivities of 130 mV/(V*kPa) in the normal stress mode and 26 mV/(V*kPa) in the two shear stress modes. The sensor was realized using a fabrication process which is fully CMOS compatible to allow for the future integration of local processing and control circuitry. High spatial resolution robotic tactile sensing may be possible with the sensor structure as each element is less than 300 x 300 /spl mu/m in size. A description of the sensor structure and the required signal processing follows, with mechanical characterization data included.