Sub-10 nm device fabrication in a transmission electron microscope
Sub-10 nm device fabrication in a transmission electron microscope
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DOI：
10.1021/nl0703626
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发表时间：
2007-05-01
期刊：
影响因子：
10.8
通讯作者：
Drndic, Marija
中科院分区：
文献类型：
--
作者：
Fischbein, Michael D.;Drndic, Marija
我们表明，高分辨率的透射电子显微镜可以用来制造金属纳米结构和绝缘膜上的纳米雕刻金属薄膜的设备。制造的器件包括具有定制曲率的纳米间隙、纳米盘、纳米环、纳米通道和纳米线以及在端子之间具有纳米岛或纳米孔的多端子纳米间隙器件。高分辨率、几何灵活性和产量使得这种制造方法对于包括纳米电子学和纳米流体学在内的许多应用具有吸引力。
We show that a high-resolution transmission electron microscope can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. Fabricated devices include nanogaps, nanodiscs, nanorings, nanochannels, and nanowires with tailored curvatures and multi-terminal nanogap devices with nanoislands or nanoholes between the terminals. The high resolution, geometrical flexibility, and yield make this fabrication method attractive for many applications including nanoelectronics and nanofluidics.