MULTILAYER MODAL METHOD FOR DIFFRACTION GRATINGS OF ARBITRARY PROFILE, DEPTH, AND PERMITTIVITY
MULTILAYER MODAL METHOD FOR DIFFRACTION GRATINGS OF ARBITRARY PROFILE, DEPTH, AND PERMITTIVITY
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DOI：
10.1364/josaa.10.002581
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发表时间：
1993-12-01
影响因子：
1.9
通讯作者：
LI, LF
中科院分区：
文献类型：
--
作者：
LI, LF
本文提出了一种数值稳定的方法，用于分析锥形安装中任意形状、任意深度和任意介电常数的衍射光栅。它是基于经典的模式方法，并使用一个叠层光栅层来近似一个任意的轮廓。被称为R-矩阵传播算法的数值过程被用来传播模式场通过层。该过程使得这种新方法的实现完全不受与传统传播算法相关联的数值不稳定性的影响。数值例子，包括衍射效率的深度范围从亚波长到数百个波长的介质和金属光栅。还包括关于该方法的收敛性和计算时间的信息。
A numerically stable method is presented for the analysis of diffraction gratings of arbitrary profile, depth, and permittivity in conical mountings. It is based on the classical modal method and uses a stack of lamellar grating layers to approximate an arbitrary profile. A numerical procedure known as the R-matrix propagation algorithm is used to propagate the modal fields through the layers. This procedure renders the implementation of this new method completely immune to the numerical instability that is associated with the conventional propagation algorithm. Numerical examples including diffraction efficiencies of both dielectric and metallic gratings of depths that range from subwavelength to hundreds of wavelengths are presented. Information about the convergence and the computation time of the method is also included.