Correspondence - Analysis of thickness vibrations of c-axis inclined zig-zag two-layered zinc oxide thin-film resonators

Correspondence - Analysis of thickness vibrations of c-axis inclined zig-zag two-layered zinc oxide thin-film resonators
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DOI：
10.1109/tuffc.2012.2526
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发表时间：
2012-12
期刊：
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
影响因子：
--
通讯作者：
Haifeng Zhang;J. Kosinski
Haifeng Zhang;J. Kosinski
中科院分区：
其他
文献类型：
--
作者：
Haifeng Zhang;J. Kosinski

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分析了外阻抗连接的两层C轴倾斜之字形氧化锌薄膜体声波谐振器的自由振动。基于线性压电学理论，推导了该谐振器的频率方程和振型。推导了FBAR的阻抗特性，并与前人的实验结果进行了比较。
The free vibrations of a two-layered C-axis inclined zig-zag ZnO thin-film bulk acoustic wave resonator (FBAR) connected to external impedance are analyzed. The frequency equation and mode shape for this resonator are derived based on the linear piezoelectric theory. The impedance characteristics of the FBAR are derived and compared with previous experimental results.